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Characterization of rf-sputtered HfMgZnO thin films

Author(s):
Publication title:
Reliability and materials issues of III-V and II-VI semiconductor optical and electron devices and materials II : symposium held April 9-13, 2012, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1432
Pub. Year:
2012
Page(from):
187
Page(to):
192
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781605114095 [160511409X]
Language:
English
Call no.:
M23500/1432
Type:
Conference Proceedings

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