Harmonic Excitation of Surface Acoustic Waves on Gallium Nitride Thin Films for Biological and Chemical Sensor Applications

Harmonic Excitation of Surface Acoustic Waves on Gallium Nitride Thin Films for Biological and Chemical Sensor Applications

Author(s):

Publication title:

MEMS, bioMEMS and bioelectronics : materials and devices : symposium held November 28-December 2 2011, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1415

Pub. Year:

2012

Page(from):

47

Page(to):

52

Pages:

6

Pub. info.:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781605113920 [1605113921]

Language:

English

Call no.:

M23500/1415

Type:

Conference Proceedings

Details

TDL ID:	ZA00051887
Series ID:	PA00000011
Conf. info. (Name):	2011 MRS Fall Meeting ; Symposium TT, Microelectromechanical Systems-Materials and Devices V
Conf. info. (Number):	2011
Conf. info. (Venue):	Boston, MA
Conf. info. (Date):	2011.11.28-2011.12.02

Similar Items:

1 Conference Proceedings Characterization of Group III-Nitride Based Surface Acoustic Wave Devices for High Temperature Applications J. Justice, L.E. Rodak, V. Narang, K. Lee, L.A. Hornak, D. Korakakis Materials Research Society	7 Conference Proceedings AlN/GaN Distributed Bragg Reflectors Grown via Metal Organic Vapor Phase Epitaxy using GaN Insertion Layers L.E. Rodak, J. Peacock, J. Justice, D. Korakakis Materials Research Society
2 Conference Proceedings Surface Acoustic Wave Sensors Deposited on AlN Thin Films J. Justice, O.M. Mukdadi, D. Korakakis Materials Research Society	8 Conference Proceedings High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride Films R. Farrell, V. R. Pagán, A. Kabulski, Sridhar Kuchibhatla, J. Harman, K. R. Kasarla, L. E. Rodak, J. Peter Hensel, P. … Materials Research Society
3 Conference Proceedings Enhanced Emission from In_xGa₁-_xN-based LED Structures Using III-Nitride-based Distributed Bragg Reflector K. Lee, A. Kadiyala, L.E. Rodak, R. Goswami, V. Kumbham, B.A. Bearce, J. Justice, J. Peacock, J.M. Dawson, L.A. Hornak, … Materials Research Society	9 Conference Proceedings Group III-nitride Based Electronic and Optoelectronic Integrated Circuits for Smart Lighting Applications J. Justice, A. Kadiyala, J. Dawson, D. Korakakis Materials Research Society
4 Conference Proceedings Properties of Digital Aluminum Gallium Nitride Alloys Grown via Metal Organic Vapor Phase Epitaxy L. E. Rodak, D. Korakakis Materials Research Society	10 Conference Proceedings Fourier Transform Infrared Spectroscopy Characterization of AlN Thin Films Grown on Sacrificial Silicon Oxide Layers via Metal Organic Vapor Phase Expitaxy Sridhar Kuchibhatla, L.E. Rodak, D. Korakakis Materials Research Society
5 Conference Proceedings Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors A. Kabulski, V. R. Pagán, D. Cortes, R. Burda, O. M. Mukdadi, D. Korakakis Materials Research Society	11 Conference Proceedings Deposition Parameter Studies Of Silicon Nitride Films Prepared By PECVD Process And Their Applications To Surface Acoustic Wave Devices Sundaram, K.B., Lee, R., Malocha, D.C., Hines, J.H. Electrochemical Society
6 Conference Proceedings Assessment of Transparent Conducting Zinc Oxide as a Tunneling Contact to p-GaN S. Musunuru, V. Kumbham, J. Justice, K. Lee, D. Korakakis, L.A. Hornak Materials Research Society	12 Conference Proceedings Effect of In as Surfactant on the Growth of AlN/GaN Distributed Bragg Reflectors by Metal Organic Vapor Phase Epitaxy L. E. Rodak, D. Korakakis Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12