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Rapid Curing of Polymer Dielectric Via Electron Beam and Variable Frequency Microwave Processing

Author(s):
S. Bidstrup-AZZen ( Georgia Tech. Inst., Atlanta, GA )  
Publication title:
Proceedings from the ninth Meeting of the Symposium on Polymers for Microelectronics at Winterthur, May 1st, 2nd, & 3rd, 2000
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-37
Pub. Year:
2000
Page(from):
362
Page(to):
391
Pages:
30
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
Language:
English
Call no.:
E23400/200037
Type:
Conference Proceedings

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