THE EFFECTS OF PROCESS-INDUCED DEFECTS ON THE CHEMICAL SELECTIVITY OF HIGHLY-DOPED BORON ETCHSTOPS
- Author(s):
- Publication title:
- Proceedings of the Second International Symposium on Semiconductor Wafer Bonding--Science, Technology, and Applications
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1993-29
- Pub. Year:
- 1993
- Page(from):
- 423
- Page(to):
- 432
- Pages:
- 10
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770682 [1566770688]
- Language:
- English
- Call no.:
- E23400/940556
- Type:
- Conference Proceedings
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