Stress in Thin Films Deposited on Rigid Suhstrates

Stress in Thin Films Deposited on Rigid Suhstrates

Author(s):: Masanori Murakami
Publication title:: Proceedings of the Symposium on Electrochemically Deposited Thin Films
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 1993-26
Pub. Year:: 1993
Page(from):: 197
Page(to):: 211
Pages:: 15
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566770613 [1566770610]
Language:: English
Call no.:: E23400/940141
Type:: Conference Proceedings

Details

TDL ID:	ZA00051844
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Electrochemically Deposited Thin Films ; Spring 1993 Meeting of the Electrochemical Society
Conf. info. (Number):	1993
Conf. info. (Date):	1993

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