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Growth of TiO₂ Thin Films on Si(001) and SiO₂ by Reactive High Power Impulse Magnetron Sputtering

Author(s):
F. Magnus
B. Agnarsson
A.S. Ingason
K. Leosson
S. Olafsson
J.T. Gudmundsson
1 more
Publication title:
Titanium dioxide nanomaterials : symposium held April 25-29, 2011, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1352
Pub. Year:
2012
Page(from):
39
Page(to):
46
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605113296 [1605113298]
Language:
English
Call no.:
M23500/1352
Type:
Conference Proceedings

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