Influence of Post-annealing Temperature on the Properties of Ti-doped In₂O₃ Transparent Conductive Films by DC Ratio-frequency Sputtering

Influence of Post-annealing Temperature on the Properties of Ti-doped In₂O₃ Transparent Conductive Films by DC Ratio-frequency Sputtering

Author(s):

Lei Li

Publication title:

Titanium dioxide nanomaterials : symposium held April 25-29, 2011, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1352

Pub. Year:

2012

Page(from):

89

Page(to):

96

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605113296 [1605113298]

Language:

English

Call no.:

M23500/1352

Type:

Conference Proceedings

Details

TDL ID:	ZA00050366
Series ID:	PA00000011
Conf. info. (Name):	MRS Spring Meeting
Conf. info. (Number):	2011
Conf. info. (Venue):	San Francisco, California, USA
Conf. info. (Date):	2011.04.25-2011.04.29

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