Improving PZT Thin Film Texture through Pt Metallization and Seed Layers

Improving PZT Thin Film Texture through Pt Metallization and Seed Layers

Author(s):

Publication title:

Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1299

Pub. Year:

2011

Page(from):

53

Page(to):

60

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605112763 [1605112763]

Language:

English

Call no.:

M23500/1299

Type:

Conference Proceedings

Details

TDL ID:	ZA00050357
Series ID:	PA00000011
Conf. info. (Name):	MRS Fall Meeting
Conf. info. (Number):	2010
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	2010.11.29-2010.12.03

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