Characterizing the Effect of Uniaxial Strain on the Surface Roughness of Si Nanowire MEMS-Based Microstructures

Characterizing the Effect of Uniaxial Strain on the Surface Roughness of Si Nanowire MEMS-Based Microstructures

Author(s):

Publication title:

Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1299

Pub. Year:

2011

Page(from):

155

Page(to):

160

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605112763 [1605112763]

Language:

English

Call no.:

M23500/1299

Type:

Conference Proceedings

Details

TDL ID:	ZA00050357
Series ID:	PA00000011
Conf. info. (Name):	MRS Fall Meeting
Conf. info. (Number):	2010
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	2010.11.29-2010.12.03

Similar Items:

1 Conference Proceedings Influence of a Ductile Interlayer on the Toughness of Hydrophilic Wafer Bonding Bertholet, Y., Raskin, J.P., Pardoen, T. Electrochemical Society	7 Conference Proceedings SOG etch-back process induced surface roughness Chu,P.-T., Chen,S.-F., Wu,J.-S., Hung,C.-C., Lin,T.-H., Chao,Y.-C. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Direct Wafer Bonding Enhanced by Ductile Layers Inserted Near the Interface B. Olbrechts, B. Lejeune, Y. Bertholet, T. Pardoen, J. Raskin Electrochemical Society	8 Conference Proceedings Effect of Boron Addition on Microstructure and Mechanical Properties of AZ84 Mg Alloy J.H. Won, S.H. Min, T.K. Ha Trans Tech Publications
3 Conference Proceedings ELECTRICALLY CONDUCTIVE MOLECULAR COMPOSITES BASED UPON PPBT AND METALLOPHTHALOCYANINES: PROCESSING, MICROSTRUCTURE, AND ELECTROCHEMISTRY DePra, P.A., Giesler, J.M., Marks, T.J., Carr, S.H. Materials Research Society	9 Conference Proceedings Effect of Boron Addition on Microstructure and Mechanical Properties of AZ84 Mg Alloy J.H. Won, S.H. Min, T.K. Ha Trans Tech Publications
4 Conference Proceedings Electrical Characterization of Epitaxial Graphene Field-Effect Transistors with High-k Al₂O₃ Gate Dielectric Fabricated on SiC Substrates T. Hopf, K. Vassilevski, E. Escobedo-Cousin, P. King, N.G. Wright Trans Tech Publications	10 Conference Proceedings Thermal Stability of Thin Virtual Substrates for High Performance Devices Sarah H. Olsen, Steve J. Bull, Peter Dobrosz, Enrique Escobedo-Cousin, Rimoon Agaiby, Anthony G. O'Neill, Howard … Materials Research Society
5 Conference Proceedings Measurement of thermal-mechanical noise in MEMS microstructures Stievater, T.H., Rabinovich, W.S., Newman, H.S., Mahon, R., Goetz, P.G., Ebel, J. L., McGee, D.J. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Effect of surface roughness of substrate to grazing incidence x-ray optics Tamura, K., Yamashita, K., Kunieda, H., Tawara, Y., Haga, K., Nakajo, N., Okajima, T., Lodha, G.S., Namba, Y., Yu, J., … SPIE
6 Conference Proceedings STRAIN RELAXATION AND SURFACE ROUGHNESS AS A FUNCTION OF GROWTH TEMPERATURE IN LINEARLY GRADED InxAl1-xAs (x=0.05 to 0.25) BUFFERS Olsen, J. A., Hu, E. L., Lee, S. R., Fritz, I. J., Howard, A. J., Hammons, B. E., Tsao, J. Y. MRS - Materials Research Society	12 Conference Proceedings Impact of surface roughness on the sensitivity enhancement of a nanowire-based surface plasmon resonance biosensor K. M. Byun, S. J. Yoon, D. Kim, S. J. Kim SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12