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Nanoscale deformation of MEMS materials

Author(s):
Publication title:
Deformation mechanisms, microstructure evolution and mechanical properties of nanoscale materials : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1297
Pub. Year:
2011
Page(from):
95
Page(to):
100
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112749 [1605112747]
Language:
English
Call no.:
M23500/1297
Type:
Conference Proceedings

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