Afterglow Chemical Processing for Oxide Growth on Silicon Carbide
- Author(s):
- Publication title:
- Silicon Carbide 2010--materials, processing and devices : symposium held April 5-9, 2010, San Francisco, California
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 1246
- Pub. Year:
- 2010
- Page(from):
- 105
- Page(to):
- 114
- Pages:
- 10
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605112237 [1605112232]
- Language:
- English
- Call no.:
- M23500/1246
- Type:
- Conference Proceedings
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