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Al-Mediated Solid-Phase Epitaxy of Silicon-On-Insulator

Author(s):
Publication title:
Amorphous and polycrystalline thin-film silicon science and technology--2010 : symposium held April 5-9, 2010, San Francisco, California
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1245
Pub. Year:
2010
Page(from):
427
Page(to):
432
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112220 [1605112224]
Language:
English
Call no.:
M23500/1245
Type:
Conference Proceedings

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