Low Temperature Dopant Activation Using Variable Frequency Microwave Annealing
- Author(s):
T.L. Alford K. Sivaramakrishnan A. Indluru Iftikhar Ahmad R. Hubbard N.D. Theodore - Publication title:
- Amorphous and polycrystalline thin-film silicon science and technology--2010 : symposium held April 5-9, 2010, San Francisco, California
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 1245
- Pub. Year:
- 2010
- Page(from):
- 331
- Page(to):
- 336
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605112220 [1605112224]
- Language:
- English
- Call no.:
- M23500/1245
- Type:
- Conference Proceedings
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