Self-Assembly of Cylinder-Forming Block Copolymers on Ultrananocrystalline Diamond (UNCD) Thin Films for Lithographic Applications

Self-Assembly of Cylinder-Forming Block Copolymers on Ultrananocrystalline Diamond (UNCD) Thin Films for Lithographic Applications

Author(s):

Publication title:

Diamond electronics and bioelectronics--fundamentals to applications III : symposium held November 30-December 3, 2009, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1203

Pub. Year:

2010

Page(from):

9

Page(to):

16

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605111766 [1605111767]

Language:

English

Call no.:

M23500/1203

Type:

Conference Proceedings

Details

TDL ID:	ZA00050321
Series ID:	PA00000011
Conf. info. (Name):	MRS Fall Meeting
Conf. info. (Number):	2009
Conf. info. (Venue):	Boston, Massachusetts, U.S.A.
Conf. info. (Date):	2009.11.30-2009.12.03

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