Residual Stresses in Sputtered ZnO Films on (100) Si Substrates by XRD | 東京工業大学附属図書館文献データベース

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Residual Stresses in Sputtered ZnO Films on (100) Si Substrates by XRD

Author(s):

Florine Conchon

Pierre-Olivier Renault

Philippe Goudeau

Eric Le Bourhis

Elin Sondergard

Etienne Barthel

Veronique Rondeau

Jacques Jupille

Publication title:

Zinc oxide and related materials--2009 : symposium held November 30-December 3, 2009, Boston, Massachusetts, USA

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1201

Pub. Year:

2010

Page(from):

81

Page(to):

86

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605111742 [1605111740]

Language:

English

Call no.:

M23500/1201

Type:

Conference Proceedings

Details

TDL ID:	ZA00050319
Series ID:	PA00000011
Conf. info. (Name):	MRS Fall Meeting
Conf. info. (Number):	2009
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	2009.11.30-2009.12.03

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