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Large Batch Etching of Gallium Nitride Using Inductively Coupled Plasma Tools as a Production Solution

Author(s):
Publication title:
Reliability and materials issues of semiconductor optical and electrical devices and materials : symposium held November 29 - December 3, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1195
Pub. Year:
2010
Page(from):
115
Page(to):
122
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605111681 [1605111686]
Language:
English
Call no.:
M23500/1195
Type:
Conference Proceedings

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