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Nanoscale Surface Patterning of Silicon Using Local Swelling Induced by He Implantation through NSL-Masks

Author(s):
Publication title:
Ion beams and nano-engineering : symposium held April 14-17, 2009, San Francisco, California, U.S.A./ editors, Daryush ILA ... [et al.]
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1181
Pub. Year:
2010
Page(from):
15
Page(to):
20
Pages:
6
Pub. info.:
Warrendale, Pa: Materials Research Society
ISSN:
02729172
ISBN:
9781605111544 [1605111546]
Language:
English
Call no.:
M23500/1181
Type:
Conference Proceedings

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