Effects of Hydrogen Plasma Treatment on Hysteresis Phenomenon and Electrical Properties for Solid Phase Crystallized Silicon Thin Film Transistors

Effects of Hydrogen Plasma Treatment on Hysteresis Phenomenon and Electrical Properties for Solid Phase Crystallized Silicon Thin Film Transistors

Author(s):

Publication title:

Amorphous and polycrystalline thin-film silicon science and technology--2009 : symposium held April 14-17, 2009, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1153

Pub. Year:

2009

Page(from):

437

Page(to):

444

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605111261 [1605111260]

Language:

English

Call no.:

M23500/1153

Type:

Conference Proceedings

Details

TDL ID:	ZA00049465
Series ID:	PA00000011
Conf. info. (Name):	MRS Spring Meeting
Conf. info. (Number):	2009
Conf. info. (Venue):	San Francisco, California, USA
Conf. info. (Date):	2009.04.14-2009.04.17

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