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Controlling Structural Evolution by VHF Power Profiling Technique for High-efficiency Microcrystalline Silicon Solar Cells at High Deposition Rate

Author(s):
Guofu Hou  
Publication title:
Amorphous and polycrystalline thin-film silicon science and technology--2009 : symposium held April 14-17, 2009, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1153
Pub. Year:
2009
Page(from):
165
Page(to):
172
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605111261 [1605111260]
Language:
English
Call no.:
M23500/1153
Type:
Conference Proceedings

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