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Wear-Corrosion Study of Tantalum-Oxide Layers Produced by Plasma Anodization Using Inductively Coupled RF Plasma

Author(s):
A. Raveh ( NRC-Negev, Beer Sheva, Israel )
M. Gelbstein ( NRC-Negev, Beer Sheva, Israel )
G. Moshe ( NRC-Negev, Beer Sheva, Israel )
M. Weiss ( NRC-Negev, Beer Sheva, Israel )
J.E. Klemberg-Sapieha ( Department of Engineering Physics, École Polytechnique de Montréal, Montréal, Quebec, Canada )
L. Martinu ( Department of Engineering Physics, École Polytechnique de Montréal, Montréal, Quebec, Canada )
1 more
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. Year:
2008
Page(from):
739
Page(to):
743
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

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