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Influence of Silicon Content on the Performance of Multilayer Diamond-Like Carbon Coatings

Author(s):
  • S. Kumar ( Plasma Processed Materials Group, National Physical Laboratory, New Delhi, India )
  • N. Goyal ( Plasma Processed Materials Group, National Physical Laboratory, New Delhi, India )
  • P.N. Dixit ( Plasma Processed Materials Group, National Physical Laboratory, New Delhi, India )
  • C.M.S. Rauthan ( Plasma Processed Materials Group, National Physical Laboratory, New Delhi, India )
  • T. Seth ( Centre for Materials for Electronics Technology, Pune, Maharesthra, India )
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. Year:
2008
Page(from):
722
Page(to):
726
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

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