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RF Plasma Enhanced Cylindrical Magnetron Sputter Deposition

Author(s):
  • R. Wei ( Southwest Research Institute®, San Antonio, TX )
  • S.L. Lee ( U.S. Army RDECOM-ARDEC, Benét Labs, Watervliet, NY )
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. Year:
2008
Page(from):
559
Page(to):
564
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

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