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An Investigation into the Properties of a Dual Source Pulsed Magnetron Sputtering System

Author(s):
  • G.C.B. Clarke ( Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, United Kingdom )
  • A. Mishra ( Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, United Kingdom )
  • G.T. West ( Department of Biology, Chemistry and Health Science, Manchester Metropolitan University, Manchester, United Kingdom )
  • P.J. Kelly ( Department of Biology, Chemistry and Health Science, Manchester Metropolitan University, Manchester, United Kingdom )
  • J.W. Bradley ( Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, United Kingdom )
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. Year:
2008
Page(from):
540
Page(to):
544
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

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