Blank Cover Image

Controlling the Incident Ion Energy at Substrate Surfaces

Author(s):
  • S.G. Walton ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
  • R.F. Fernsler ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
  • E.H. Lock ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. Year:
2008
Page(from):
535
Page(to):
539
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Ion Flux Measurements in Electron Beam-Generated Plasmas

S.G. Walton, D. Leonhardt, R.F. Fernsler, R.A. Meger

Society of Vacuum Coaters
7 Conference Proceedings Detection of biomolecules using nanoparticle surface enhanced Raman scattering tags

Freeman, R.G., Doering, W.E., Walton, I, D., Penn, S.G., Davis, G., Wong, F., Natan, M.J.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Diagnostics and Processing Applications of Electron Beam-Generated Plasmas Produced in Nitrogen

S.G. Walton, D. Leonhardt, R.F. Fernsler

Society of Vacuum Coaters
8 Conference Proceedings Hardness Enhancement and Crosslinking Mechanisms in Polystyrene Irradiated with High Energy Ion-Beams

Lee,E.H., Rao,G.R., Mansur,L.K.

Trans Tech Publications
3 Conference Proceedings Materials Processing in Electron Beam-Generated Plasmas

C. Muratore, S.G. Walton, D. Leonhardt, R.F. Fernsler, R.A. Meger

Society of Vacuum Coaters
9 Conference Proceedings Design and Fabrication of High Current Switching TFTs on Flexible Polyimide Substrates

Burns, S.G., Shanks, H.R., Constant, A.P., Gruber, C., Schmidt, D., Landin, A., Olympie, F.

Electrochemical Society
4 Conference Proceedings Characterizations of Electron Beam-Generated Plasmas

S.G. Walton, D. Leonhardt, R.F. Fernsler, R.A. Meger, D.D. Blackwell, C. Muratore

Society of Vacuum Coaters
10 Conference Proceedings Resistivity and Microstructure Issues in Indium-Oxide Based Films Grown by RF Magnetron Sputtering on Flexible Polyester Substrates

P.F. Carcia, R.S. McLean, M.H. Reilly, Z.G. Li, L. J. Pillione, R.F. Messier

Society of Vacuum Coaters
5 Conference Proceedings Plasma Processing System Based on Electron Beam Ionization

D. Leonhardt, M.M. Balkey, R.F. Fernsler, R.A. Meger, D.P. Murphy, S.G. Walton, D.D. Blackwell

Society of Vacuum Coaters
11 Conference Proceedings Decoherence bounds on the capabilities of cold trapped ion quantum computers

James,D.F.V., Hughes,R.J., Knill,E.H., Laflamme,R., Petschek,A.G.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Actively mode-locked THz p-Ge hot-hole lasers with electric pulse-separation control and gain control

Strijbos,R.C., Muravjov,A.V., Withers,S.H., Pavlov,S.G., Shastin,V.N., Peale,R.E.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Large Area PECVD Coatings Using Linear Electron Beam Curtains

A. Yializis, G. Goodyear, S.G. Walton

Society of Vacuum Coaters
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12