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Research on Promising Applications for High Power Pulse Magnetron Sputtering

Author(s):
V. Sittinger ( Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany )
B. Szyszka ( Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany )
R. Bandorf ( Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany )
M. Vergöhl ( Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany )
A. Pflug ( Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany )
D.J. Christie ( Advanced Energy, Fort Collins, CO )
F. Ruske ( Hahn-Meitner-Institut Berlin, Berlin, Germany )
2 more
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. Year:
2008
Page(from):
293
Page(to):
301
Pages:
9
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

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