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High Power Impulse Magnetron Sputtering for Industrial Applications: Deposition of Chromium Films on Inclined Surfaces

Author(s):
G. Greczynski ( Chemfilt lonsputtering AB, Linköping, Sweden )
J. Böhlmark ( Chemfilt lonsputtering AB, Linköping, Sweden )
Y.T. Pei ( Department of Applied Physics, Netherlands Institute for Metals Research, University of Groningen, Groningen, The Netherlands )
C.Q. Chen ( Department of Applied Physics, Netherlands Institute for Metals Research, University of Groningen, Groningen, The Netherlands )
J.T.M. De Hosson ( Department of Applied Physics, Netherlands Institute for Metals Research, University of Groningen, Groningen, The Netherlands )
M. Alunovic ( CemeCon AG, Würselen, Germany )
R. Cremer ( CemeCon AG, Würselen, Germany )
2 more
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. Year:
2008
Page(from):
282
Page(to):
287
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

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