PECVD of SiOx Films with Electron Beam Generated Plasmas

PECVD of SiOx Films with Electron Beam Generated Plasmas

Author(s):

D. Leonhardt ( US Naval Research Laboratory, Plasma Physics Division, Washington, DC )
S.G. Walton ( US Naval Research Laboratory, Plasma Physics Division, Washington, DC )

Publication title:

49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

49

Pub. Year:

2006

Page(from):

389

Page(to):

393

Pages:

5

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/49

Type:

Conference Proceedings

Details

TDL ID:	ZA00049387
Series ID:	PA00000013
Conf. info. (Name):	Society of Vacuum Coaters. Annual technical conference
Conf. info. (Number):	2006 : 49th
Conf. info. (Venue):	Washington, D.C. USA
Conf. info. (Date):	2006.04.22-2006.04.27

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