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High-power Pulsed Sputtering with a Newly Designed Magnetron

Author(s):
  • J. Vlcek ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
  • P. Kudlacek ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
  • K. Burcalova ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
  • J. Musil ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
Publication title:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
49
Pub. Year:
2006
Page(from):
338
Page(to):
342
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/49
Type:
Conference Proceedings

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