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The High Power Impulse Magnetron Sputtering Discharge: The Ionization Mechanism

Author(s):
J.T Gudmundsson ( Science Institute and Department of Electrical and Computer Engineering, University of. Iceland, Reykiavik, Iceland )  
Publication title:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
49
Pub. Year:
2006
Page(from):
329
Page(to):
333
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/49
Type:
Conference Proceedings

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