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Deposition of Multilayer Optical Films and Rugate Filters Deposited by Reactive Magnetron Sputtering

Author(s):
M. Vergöhl ( Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany )
C. Rickers ( Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany )
U. Kricheldorf ( Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany )
K. Schiffmann ( Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany )
P. Giesel ( Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany )
R. Dittrich ( IfU GmbH, Lichtenau, Germany )
U. Richter ( Sentech Instruments GmbH, Berlin, Germany )
2 more
Publication title:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
49
Pub. Year:
2006
Page(from):
265
Page(to):
270
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/49
Type:
Conference Proceedings

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