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Properties of Indium Tin Oxide Deposited Using Reactive Closed Field Magnetron Sputtering

Author(s):
  • D.R. Gibson ( Applied Multilayers Ltd., Coalville, United Kingdom )
  • I.T. Brinkley ( Applied Multilayers Ltd., Coalville, United Kingdom )
  • G.H. Hall ( Applied Multilayers Ltd., Coalville, United Kingdom )
  • E.M. Waddell ( Applied Multilayers Ltd., Coalville, United Kingdom )
  • J.M. Walls ( Applied Multilayers Ltd., Coalville, United Kingdom )
Publication title:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
49
Pub. Year:
2006
Page(from):
260
Page(to):
264
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/49
Type:
Conference Proceedings

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