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Surface Resistivity Distribution of SnO₂ Coatings Deposited Using a Rectangular Filtered Vacuum Arc Deposition System

Author(s):
  • R.L. Boxman ( Electrical Discharge and Plasma Laboratory, Tel-Aviv University, Tel-Aviv, Israel )
  • V.N. Zhitomirsky ( Electrical Discharge and Plasma Laboratory, Tel-Aviv University, Tel-Aviv, Israel )
  • Z. Abunie ( Electrical Discharge and Plasma Laboratory, Tel-Aviv University, Tel-Aviv, Israel )
Publication title:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
49
Pub. Year:
2006
Page(from):
157
Page(to):
161
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/49
Type:
Conference Proceedings

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