Surface Resistivity Distribution of SnO₂ Coatings Deposited Using a Rectangular Filtered Vacuum Arc Deposition System
- Author(s):
- R.L. Boxman ( Electrical Discharge and Plasma Laboratory, Tel-Aviv University, Tel-Aviv, Israel )
- V.N. Zhitomirsky ( Electrical Discharge and Plasma Laboratory, Tel-Aviv University, Tel-Aviv, Israel )
- Z. Abunie ( Electrical Discharge and Plasma Laboratory, Tel-Aviv University, Tel-Aviv, Israel )
- Publication title:
- 49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 49
- Pub. Year:
- 2006
- Page(from):
- 157
- Page(to):
- 161
- Pages:
- 5
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/49
- Type:
- Conference Proceedings
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