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Plasma-Assisted Atomic Layer Deposition of Al₂O₃ on Polymers

Author(s):
  • E. Langereis ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • S.B.S. Heil ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • M. Creatore ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • M.C.M. van de Sanden ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • W.M.M. Kessels ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
Publication title:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
49
Pub. Year:
2006
Page(from):
151
Page(to):
156
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/49
Type:
Conference Proceedings

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