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Investigation of Reactively Sputtered Titania Thin Films Prepared by DC, Pulsed and Highly Ionized Pulsed Power Magnetron Sputtering

Author(s):
  • R. Bandori ( Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany )
  • M. Vergöhl ( Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany )
  • K. Schiffmann ( Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany )
  • T. Wallendori ( IfU GmbH, Lichtenau, Germany )
Publication title:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
49
Pub. Year:
2006
Page(from):
21
Page(to):
26
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/49
Type:
Conference Proceedings

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