Blank Cover Image

Structure and Secondary Electron Emission Properties of MgO Films Deposited by Pulsed Mid-Frequency Magnetron Sputtering

Author(s):
  • C. Peters ( Fraunhofer Institute FEP, Dresden, Germany )
  • U. Krause ( Fraunhofer Institute FEP, Dresden, Germany )
  • H. Kupfer ( University of Technology Chemnitz, Institute of Physics, Chemnitz, Germany )
  • R. Kleinhempel ( University of Technology Chemnitz, Institute of Physics, Chemnitz, Germany )
  • F. Richter ( University of Technology Chemnitz, Institute of Physics, Chemnitz, Germany )
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
703
Page(to):
706
Pages:
4
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Characterization and Wettability of TiO2 Films Deposited by Mid-Frequency Magnetron Reactive Sputtering

Y. Cui, H. Du, S.W. Lee, C. Sun, L.S. Wen

Trans Tech Publications
7 Conference Proceedings Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering

T.T.H. Pham, E. Le Bourhis, P. Goudeau, P. Guérin

Trans Tech Publications
2 Conference Proceedings Investigation of Mechanical and Structural Properties of AlN Thin Films Prepared by Mid-Frequency Pulsed Magnetron Sputtering

Z.X. Mu, A.M. Wu, L. Jia, Z.W. Wang, H.Y. Zhao, S.G. Liu

Trans Tech Publications
8 Conference Proceedings Optical properties of thin films deposited by reactive-Rf-magnetron sputtering

Yoshida,K., Kamimura,T., Ochi,K., Kaku,S., Yoshida,H., Fujita,H., Tani,F., Sunagawa,M., Okamoto,T.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors

Kupfer,H., Richter,F., Schlott,P., Duparre,A., Gliech,S.

SPIE - The International Society for Optical Engineering
9 Conference Proceedings Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering

Lei, Y.M., Yu, Y.H., Cheng, L.L., Lin, L., Sundaraval, B., Luo, E.Z., Lin, S., Ren, C.X., Cheung, W.Y., Wong, S.P., Xu, …

Trans Tech Publications
4 Conference Proceedings Mechanical and Tribological Properties of a-GeCx Films Deposited by dc Magnetron Sputtering

Jacobsohn, L. G., Reigada, D. C., Freire, F. L., Jr., Prioli, R., Zanette, S. I., Caride, A. O., Nascimento, F. C., …

MRS - Materials Research Society
10 Conference Proceedings Effect of Electrodes on Crystallization and Electrical Properties of Ferroelectric PZT Films Deposited by RF Magnetron Sputtering

Ea-Kim, B., Varniere, F., Hugon, M. C., Agius, B., Bisaro, R., Olivier, J.

MRS - Materials Research Society
5 Conference Proceedings Deposition of Multilayer Optical Films and Rugate Filters Deposited by Reactive Magnetron Sputtering

M. Vergöhl, C. Rickers, U. Kricheldorf, K. Schiffmann, P. Giesel, R. Dittrich, U. Richter

Society of Vacuum Coaters
11 Conference Proceedings Influence of the Sputtering Pressure on the Properties of TAZO Films Prepared by DC Magnetron Sputtering

H.F. Liu, C.K. Yuan

Trans Tech Publications
6 Conference Proceedings Structure and Properties of W-Ti Thin Films Deposited by Magnetron Sputtering

G.Q. Sun, S. Yong, Y.H. Duan

Trans Tech Publications
12 Conference Proceedings Electrical and optical properties of indium tin oxide films prepared by pulsed magnetron sputtering

Chou,H.-W., Lee,W.J., Tsai,R.-Y., Fang,Y.K., Chen,C.C.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12