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Model Prediction and Empirical Confirmation of Rate Scaling with Peak Power for High Power Pulse Magnetron Sputtering (HPPMS) Deposition of Thin Ag Films

Author(s):
D.J. Christie ( Advanced Energy, Fort Collins, CO )
A. Pflug ( Fraunhofer-Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany )
V. Sittinger ( Fraunhofer-Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany )
F. Ruske ( Fraunhofer-Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany )
M. Siemers ( Fraunhofer-Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany )
B. Szyszka ( Fraunhofer-Institute for Thin Films and Surface Engineering (IST), Braunschweig, Germany )
M. Geisler ( Applied Films GmbH & Co.KG, Alzenau, Germany )
2 more
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
501
Page(to):
503
Pages:
3
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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