HIPIMS Deposition of Copper Films: Correlation of Experiments to Model Predictions

Author(s):

S. Chennadi ( Department of Mechanical Engineering, University of Nebraska, Lincoln, NE )

D.J. Christie ( Advanced Energy, Fort Collins, CO )

S. Sevvana ( Department of Mechanical Engineering, University of Nebraska, Lincoln, NE )

R.K. Lakkaraju ( Department of Mechanical Engineering, University of Nebraska, Lincoln, NE )

J. Li ( Department of Mechanical Engineering, University of Nebraska, Lincoln, NE )

D.M. Mihut ( Department of Mechanical Engineering, University of Nebraska, Lincoln, NE )

S.L. Rohde ( Department of Mechanical Engineering, University of Nebraska, Lincoln, NE )

2 more

Publication title:

48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

48

Pub. Year:

2005

Page(from):

474

Page(to):

479

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/48

Type:

Conference Proceedings