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Characterization of High-power Pulsed dc Magnetron Discharges for Ionized High-rate Sputtering of Copper Films

Author(s):
J. Vlcek ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
A.D. Pajdarova ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
P. Belsky ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
J. Lukas ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
P. Kudlacek ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
J. Musil ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
1 more
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
465
Page(to):
469
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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