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High Power Impulse Magnetron Sputtering Discharges and Thin Film Growth: A Brief Review

Author(s):
U. Helmersson ( Linköping University, Linköping, Sweden )
M. Lattemann ( Linköping University, Linköping, Sweden )
J. Alami ( Linköping University, Linköping, Sweden )
J. Bohlmark ( Linköping University, Linköping, Sweden )
A.P. Ehiasarian ( Sheffield Hallam University, Sheffield, UK )
J.T. Gudmundsson ( University of Iceland, Reykjavík, Iceland )
1 more
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
458
Page(to):
464
Pages:
7
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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