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Improving Rate Control in Electron-Beam Evaporated Optical Coatings: Maintaining Source Surface Uniformity for Large Size Laser Optics Coatings and Evaluation of System Drift

Author(s):
  • B. Xu ( Manufacturing Engineering, Boston University, Brookline, MA )
  • M. Gevelber ( Manufacturing Engineering, Boston University, Brookline, MA )
  • D. Smith ( Plymouth Grating Laboratory Inc., Plymouth, MA )
  • B. Vattiat ( Cyber Materials LLC, Auburndale, MA )
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
400
Page(to):
405
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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