Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons

Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons

Author(s):

G. Buyle ( Ghent University, Ghent, Belgium )
D. Depla ( Ghent University, Ghent, Belgium )
K. Eufinger ( Ghent University, Ghent, Belgium )
R. De Gryse ( Ghent University, Ghent, Belgium )
W. De Bosscher ( Bekaert Advanced Coatings N.V., Zulte, Belgium )

Publication title:

48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

48

Pub. Year:

2005

Page(from):

254

Page(to):

259

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/48

Type:

Conference Proceedings

Details

TDL ID:	ZA00049386
Series ID:	PA00000013
Conf. info. (Name):	Society of Vacuum Coaters. Annual technical conference
Conf. info. (Number):	2005 : 48th
Conf. info. (Venue):	Denver, Colorado USA
Conf. info. (Date):	2005.04.23-2005.04.28

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