Blank Cover Image

Ion-induced Effects During Reactive Sputtering of ITO Films

Author(s):
  • M. Dudek ( École Polytechnique de Montréal, Québec, Canada )
  • O. Zabeida ( École Polytechnique de Montréal, Québec, Canada )
  • J.E. Klemberg-Sapieha ( École Polytechnique de Montréal, Québec, Canada )
  • L. Martinu ( École Polytechnique de Montréal, Québec, Canada )
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
192
Page(to):
198
Pages:
7
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Thermo Mechanical Characteristics of Niobium Oxide Optical Thin Films Deposited by Dual Ion Beam Sputtering

E. Çetinörgü, B. Baloukas, O. Zabeida, J.E. Klemberg-Sapieha, L. Martinu

Society of Vacuum Coaters
7 Conference Proceedings Nanocomposite TiCxNy/SiCN Superhard Coatings Prepared by PECVD

P. Jedrzejowski, J.E. Klemberg-Sapieha, L. Martinu

Society of Vacuum Coaters
2 Conference Proceedings Effect of Ion Bombardment in Polymer Surface Modification: Comparison of Pulsed High Frequency Plasma and Ion Beam

Zabeida, O., Klemberg-Sapieha, J. E., Martinu, L., Morton, D.

MRS - Materials Research Society
8 Conference Proceedings Measurement of Super Hard Coatings by Instrumented Nano-indentation: Progress Report on the International VAMAS Activity (TWA22)

J.E. Klemberg-Sapieha, L. Martinu, R Jedrzejowski, N. Jennett

Society of Vacuum Coaters
3 Conference Proceedings Tribological Properties of PECVD Optical Coatings

M.-A. Raymond, S. Larouche, O. Zabeida, L. Martinu, J.E. Klemberg-Sapieha

Society of Vacuum Coaters
9 Conference Proceedings Finite Element Modelling for the Design and Optimization of Erosion Resistant Coatings

S. Hassani, J.E. Klemberg-Sapieha, L. Martinu, M. Bielawski, W. Beres, M. Balazinski

Society of Vacuum Coaters
4 Conference Proceedings Adhesion of Hybrid Poly (ethylene glycol) - Soy Protein Hydrogels to Plasma Treated Polymer Surfaces

R. Snyders, O. Zabeida, K. Shingell, C. Roberge, L. Martinu, J.E. Klemberg-Sapieha

Society of Vacuum Coaters
10 Conference Proceedings Wear-Corrosion Study of Tantalum-Oxide Layers Produced by Plasma Anodization Using Inductively Coupled RF Plasma

A. Raveh, M. Gelbstein, G. Moshe, M. Weiss, J.E. Klemberg-Sapieha, L. Martinu

Society of Vacuum Coaters
5 Conference Proceedings In Situ Growth Monitoring of Nanocomposite TiN/SiN₁.₃ and TiCxNy/SiCN Films Using Spectroscopic Ellipsometry

P. Jedrzejowski, A. Amassian, E. Bousser, L. Martinu, J.E. Klemberg-Sapieha

Society of Vacuum Coaters
11 Conference Proceedings Search for High Index PECVD Optical Coating Materials: The Case of Titanium Dioxide

L. Martinu, M. Latréche, V. Hajek, J.E. Klemberg-Sapieha, A. Argoitia, W.T. Beauchamp

Society of Vacuum Coaters
6 Conference Proceedings Nano- and Micromechanical Characterization of Optical Coatings Fabricated by PECVD

J.E. Klemberg-Sapieha, S. DahI and, L. Martinu

Society of Vacuum Coaters
12 Conference Proceedings Characterization of Plasma-Deposited Au/Fluoropolymer Nanocomposite Films for Nonlinear Optical Application

Dalacu, D., Brown, A. P., Klemberg-Sapieha, J. E., Martinu, L., Wertheimer, M. R., Najafi, S. I., Andrews, M. A.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12