Initiated Chemical Vapor Deposition (iCVD) of Polymer Thin Films

Author(s):

• H.G. Pryce Lewis ( GVD Corporation, Cambridge, MA )
• K.K.S. Lau ( Massachusetts Institute of Technology, Cambridge, MA )
• Y. Mao ( Massachusetts Institute of Technology, Cambridge, MA )
• K.K. Gleason ( Massachusetts Institute of Technology, Cambridge, MA )

Publication title:

48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

48

Pub. Year:

2005

Page(from):

90

Page(to):

94

Pages:

5

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/48

Type:

Conference Proceedings