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In Situ Growth Monitoring of Nanocomposite TiN/SiN₁.₃ and TiCxNy/SiCN Films Using Spectroscopic Ellipsometry

Author(s):
  • P. Jedrzejowski ( École Polytechnique, Montréal, Québec, Canada )
  • A. Amassian ( École Polytechnique, Montréal, Québec, Canada )
  • E. Bousser ( École Polytechnique, Montréal, Québec, Canada )
  • L. Martinu ( École Polytechnique, Montréal, Québec, Canada )
  • J.E. Klemberg-Sapieha ( École Polytechnique, Montréal, Québec, Canada )
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
68
Page(to):
73
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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