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Laser-Arc Process and Technology for Deposition of Hard Amorphous Carbon (ta-C)

Author(s):
  • H.-J. Scheibe ( Fraunhofer USA, Center for Coatings and Laser Applications, Michigan State University, East Lansing, MI )
  • B. Schultrich ( Fraunhofer Institute for Material and Beam Technology, Dresden, Germany )
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
501
Page(to):
508
Pages:
8
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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