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High-power Pulsed dc Magnetron Discharges for Ionized High-rate Sputtering of Thin Films

Author(s):
J. Vlcek ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
A.D. Pajdarova ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
P. Belsky ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
M. Kormunda ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
J. Lestina ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
J. Musil ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
1 more
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
426
Page(to):
431
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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