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Cylindrical Magnetron Sputtering in a Ferromagnetic Cylinder

Author(s):
  • F. Yee ( US Army Armament Research, Development and Engineering Center, Benét Laboratories, Watervliet, NY )
  • M. Wotzak ( US Army Armament Research, Development and Engineering Center, Benét Laboratories, Watervliet, NY )
  • M. Cipollo ( US Army Armament Research, Development and Engineering Center, Benét Laboratories, Watervliet, NY )
  • K. Truszkowska ( US Army Armament Research, Development and Engineering Center, Benét Laboratories, Watervliet, NY )
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
421
Page(to):
425
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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