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Removing Surface Contaminants from Silicon Wafers to Facilitate EUV Optical Characterization

Author(s):
R.E. Robinson ( Department of Physics & Astronomy, University of Rochester, Rochester, NY )
R.L. Sandberg ( Department of Physics & Astronomy, Brigham Young University, Provo, UT )
D.D. Allred ( Department of Physics & Astronomy, Brigham Young University, Provo, UT )
A.L. Jackson ( Department of Physics & Astronomy, Brigham Young University, Provo, UT )
J.E. Johnson ( Department of Physics & Astronomy, Brigham Young University, Provo, UT )
W. Evans ( Department of Physics & Astronomy, Brigham Young University, Provo, UT )
T. Doughty ( Department of Physics & Astronomy, Brigham Young University, Provo, UT )
A.E. Baker ( Department of Physics & Astronomy, Brigham Young University, Provo, UT )
K. Adamson ( Department of Physics & Astronomy, Brigham Young University, Provo, UT )
A. Jacquier ( Department of Physics & Astronomy, Brigham Young University, Provo, UT )
5 more
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
368
Page(to):
376
Pages:
9
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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