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Structural Characterization of Wurtzite Al₁₋xInxN (0.1
Author(s):
T. Seppänen ( Thin Film Physics Div., Department of Physics and Measurement Technology (IFM), Linköping University, Linköping, Sweden )
P.O.Å. Persson ( Thin Film Physics Div., Department of Physics and Measurement Technology (IFM), Linköping University, Linköping, Sweden )
G.Z. Radnóczi ( Thin Film Physics Div., Department of Physics and Measurement Technology (IFM), Linköping University, Linköping, Sweden and Research Institute for Technical Physics and Materials Science (MFA) of the Hungarian Academy of Sciences, Budapest, Hungary )
B. Pécz ( Thin Film Physics Div., Department of Physics and Measurement Technology (IFM), Linköping University, Linköping, Sweden and Research Institute for Technical Physics and Materials Science (MFA) of the Hungarian Academy of Sciences, Budapest, Hungary )
L. Hultman ( Thin Film Physics Div., Department of Physics and Measurement Technology (IFM), Linköping University, Linköping, Sweden )
J. Birch ( Thin Film Physics Div., Department of Physics and Measurement Technology (IFM), Linköping University, Linköping, Sweden )
1 more
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
347
Page(to):
352
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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