High Power Pulsed Reactive Sputtering of Zirconium Oxide and Tantalum Oxide

High Power Pulsed Reactive Sputtering of Zirconium Oxide and Tantalum Oxide

Author(s):

D.A. Glocker ( Isoflux Incorporated, Rochester, NY )
M.M. Romach ( Isoflux Incorporated, Rochester, NY )
D.J. Christie ( Advanced Energy Industries, Fort Collins, CO )
W.D. Sproul ( Advanced Energy Industries, Fort Collins, CO )

Publication title:

47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

47

Pub. Year:

2004

Page(from):

183

Page(to):

188

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/47

Type:

Conference Proceedings

Details

TDL ID:	ZA00049385
Series ID:	PA00000013
Conf. info. (Name):	Society of Vacuum Coaters. Annual technical conference
Conf. info. (Number):	2004 : 47th
Conf. info. (Venue):	Dallas, Texas USA
Conf. info. (Date):	2004.04.24-2004.04.29

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